Application of InAs/AlSb materials system for development of short-wavelength quantum cascade lasers is explored. Molecular beam epitaxy (MBE) technology allowing to grow multiperiodical unstrained InAs/AlSb heterostructures with roughness of 1-2 monolayers is developed. It is demonstrated that InAs/AlSb materials system is well-suitable for development of short-wavelength quantum cascade lasers operating below 4 µm wavelength. Lasers containing plasmon-enhanced waveguides as well as the short period InAs/AlSb superlattices as waveguides were designed, MBE-grown and studied. The effect of waveguide properties on the device parameters is revealed. Usage of these waveguides and innovations in laser active region introducing “funnel” injector allowed one to reach operation temperature 420 K at the emission wavelength of 3.3 µm. The obtained optical peak power exceeded 1 W per facet. The room temperature operation has been obtained at wavelength below 3 µm. As for wavelength range, applying the new active region design strategy and the short period InAs/AlSb superlattice spacers InAs based quantum cascade lasers emitting at the wavelengths as short as 2.63 µm were developed, which is today the shortest emission wavelength of the operation of semiconductor lasers based on the intersubband transitions.

Raktažodžiai: QCL, InAs/AlSb, quantum cascade lasers